The sol-gel route has been applied to obtain ZnO-TiO(2) thin films. For comparison, pure TiO(2) and ZnO films are also prepared from the corresponding solutions. The films are deposited by a spin-coated method on silicon and glass substrates. Their structural and vibrational properties have been studied as a function of the annealing temperatures (400-750 degrees C). Pure ZnO films crystallize in a wurtzite modification at a relatively low temperature of 400 degrees C, whereas the mixed oxide films show predominantly amorphous structure at this temperature. XRD analysis shows that by increasing the annealing temperatures, the sol-gel Zn/Ti oxide films reveal a certain degree of crystallization and their structures are found to be mixtures of wurtzite ZnO, Zn(2)TiO(4), anatase TiO(2) and amorphous fraction. The XRD analysis presumes that Zn(2)TiO(4) becomes a favored phase at the highest annealing temperature of 750 degrees C. The obtained thin films are uniform with no visual defects. The optical properties of ZnO-TiO(2) films have been compared with those of single component films (ZnO and TiO(2)). The mixed oxide films present a high transparency with a slight decrease by increasing the annealing temperature. (C) 2011 Elsevier B.V. All rights reserved.