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ECS Meeting Abstracts, 12(MA2006-01), p. 549-549, 2006

DOI: 10.1149/ma2006-01/12/549

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Analysis of nano-scale stress in strained silicon materials and microelectronics devices by energy-filtered convergent beam electron diffraction

Journal article published in 2006 by Peng Zhang, Andrei A. Istratov, Haifeng He, Chris Nelson, Joel W. Ager ORCID, Eric Stach, J. Mardinly, Christian Kisielowski, John C. H. Spence, Eicke R. Weber
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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