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Johannes Herrnsdorf
Stonehouse et al., 2018
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@inproceedings{Stonehouse2018, author = {Stonehouse, Mark and Zhang, Yanchao and Guilhabert, Benoit Jack Eloi and Watson, Ian and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin}, month = {dec}, title = {Digital illumination in microscale direct-writing photolithography}, year = {2018} }
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Digital illumination in microscale direct-writing photolithography
Proceedings article published in 2018 by
Mark Stonehouse
,
Yanchao Zhang
,
Benoit Jack Eloi Guilhabert
,
Ian Watson
,
Erdan Gu
,
Johannes Herrnsdorf
,
Martin Dawson
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