Published in
Institute of Electrical and Electronics Engineers, IEEE Journal of the Electron Devices Society, (6), p. 1159-1163, 2018
DOI: 10.1109/jeds.2018.2870893
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CVD Growth Technologies of Layered MX<sub>2</sub> Materials for Real LSI Applications—Position and Growth Direction Control and Gas Source Synthesis
Journal article published in 2018 by
T. Irisawa 
,
T. Endo,
Y. Miyata,
N. Okada,
W. Mizubayashi,
T. Mori ,
W.-H. Chang ,
K. Koga,
A. Ando,
K. Endo,
S. Sasaki
,
T. Endo,
Y. Miyata,
N. Okada,
W. Mizubayashi,
T. Mori ,
W.-H. Chang ,
K. Koga,
A. Ando,
K. Endo,
S. Sasaki
This paper is made freely available by the publisher.
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