Published in
American Institute of Physics, Applied Physics Letters, 24(111), p. 242901
DOI: 10.1063/1.4995619
Links
Tools
Large ferroelectric polarization of TiN/Hf0.5Zr0.5O2/TiN capacitors due to stress-induced crystallization at low thermal budget
Journal article published in 2017 by
Si Joon Kim,
Dushyant Narayan,
Jae-Gil Lee,
Jaidah Mohan,
Joy S. Lee 
,
Jaebeom Lee,
Harrison S. Kim,
Young-Chul Byun ,
Antonio T. Lucero,
Chadwin D. Young ,
Scott R. Summerfelt,
Tamer San,
Luigi Colombo,
Jiyoung Kim
,
Jaebeom Lee,
Harrison S. Kim,
Young-Chul Byun ,
Antonio T. Lucero,
Chadwin D. Young ,
Scott R. Summerfelt,
Tamer San,
Luigi Colombo,
Jiyoung Kim
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 