Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices
Journal article published in 2018 by
Bigeng Chen 
,
Xingshi Yu,
Xia Chen,
Milan M. Milosevic,
David J. Thomson,
Ali Z. Khokhar,
Shinichi Saito,
Otto L. Muskens ,
Graham T. Reed
,
Xingshi Yu,
Xia Chen,
Milan M. Milosevic,
David J. Thomson,
Ali Z. Khokhar,
Shinichi Saito,
Otto L. Muskens ,
Graham T. Reed
This paper is made freely available by the publisher.
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