Published in

International Union of Crystallography, Acta Crystallographica Section A: Foundations and Advances, 1(74), p. 66-70, 2018

DOI: 10.1107/s205327331701525x

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Multislice imaging of integrated circuits by precession X-ray ptychography

Journal article published in 2018 by Kei Shimomura, Makoto Hirose, Yukio Takahashi ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Data provided by SHERPA/RoMEO

Abstract

A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a ∼1.4 µm gap at nine incident angles are collected in a wideQrange and then artifact-reduced phase images of each layer are successfully reconstructed at ∼10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 µm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.