Published in
Elsevier, Sensors and Actuators A: Physical, (263), p. 188-197
DOI: 10.1016/j.sna.2017.06.003
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Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators
Journal article published in 2017 by
C. Tu 
,
A. Frank,
S. Michael,
J. Stegner,
U. Stehr,
M. Hein,
J. E.-Y. Lee
,
A. Frank,
S. Michael,
J. Stegner,
U. Stehr,
M. Hein,
J. E.-Y. Lee
This paper was not found in any repository, but could be made available legally by the author.
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