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American Institute of Physics, Journal of Applied Physics, 17(121), p. 171915

DOI: 10.1063/1.4978348

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Investigation of plasma spokes in reactive high power impulse magnetron sputtering discharge

Journal article published in 2017 by A. Hecimovic, C. Corbella, C. Maszl ORCID, W. Breilmann, A. von Keudell
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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