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IOP Publishing, Journal of Physics D: Applied Physics, 11(51), p. 115201, 2018

DOI: 10.1088/1361-6463/aaac15

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Influence of spokes on the ionized metal flux fraction in chromium high power impulse magnetron sputtering

Journal article published in 2018 by B. Biskup ORCID, C. Maszl ORCID, W. Breilmann, J. Held ORCID, M. Böke ORCID, Jan Benedikt ORCID, A. von Keudell ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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