Published in
IOP Publishing, Journal of Physics D: Applied Physics, 11(51), p. 115201, 2018
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Influence of spokes on the ionized metal flux fraction in chromium high power impulse magnetron sputtering
Journal article published in 2018 by
B. Biskup 
,
C. Maszl ,
W. Breilmann,
J. Held ,
M. Böke ,
Jan Benedikt ,
A. von Keudell
,
C. Maszl ,
W. Breilmann,
J. Held ,
M. Böke ,
Jan Benedikt ,
A. von Keudell
This paper is made freely available by the publisher.
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