Published in
Elsevier, Journal of Loss Prevention in the Process Industries, (45), p. 78-87
DOI: 10.1016/j.jlp.2016.11.008
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Reactivity of deposited byproducts generated from ZrO2 atomic layer deposition
Journal article published in 2017 by
Shasha Zhang,
David E. Speed,
Steven R. Trammell,
Susan T. Sharfstein 
This paper was not found in any repository, but could be made available legally by the author.
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