Published in
Elsevier, Microelectronic Engineering, (178), p. 271-274, 2017
DOI: 10.1016/j.mee.2017.05.018
Links
Tools
Enhancement of effective dielectric constant using high-temperature mixed and sub-nano-laminated atomic layer deposited Y2O3/Al2O3 on GaAs(001)
Journal article published in 2017 by
K. Y. Lin,
L. B. Young,
C. K. Cheng,
K. H. Chen,
Y. H. Lin 
,
H. W. Wan,
R. F. Cai,
S. C. Lo,
M. Y. Li,
J. Kwo,
M. Hong
,
H. W. Wan,
R. F. Cai,
S. C. Lo,
M. Y. Li,
J. Kwo,
M. Hong
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 