CMOS-Compatible Controlled Hyperdoping of Silicon Nanowires
Journal article published in 2018 by
Yonder Berencén 
,
Slawomir Prucnal,
Wolfhard Möller,
René Hübner,
Lars Rebohle,
Roman Böttger,
Markus Glaser,
Tommy Schönherr,
Ye Yuan,
Yordan M. Georgiev,
Mao Wang ,
Artur Erbe,
Shengqiang Zhou,
Alois Lugstein,
Manfred Helm
and other authors.
,
Slawomir Prucnal,
Wolfhard Möller,
René Hübner,
Lars Rebohle,
Roman Böttger,
Markus Glaser,
Tommy Schönherr,
Ye Yuan,
Yordan M. Georgiev,
Mao Wang ,
Artur Erbe,
Shengqiang Zhou,
Alois Lugstein,
Manfred Helm
and other authors.
This paper is made freely available by the publisher.
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