Morphological features in aluminum nitride epilayers prepared by magnetron sputtering
Journal article published in 2015 by
Sebastian Stach 
,
Dinara Dallaeva,
Ştefan Ţălu,
S. ŢAlu,
Pavel Kaspar,
Pavel Tománek,
Stefano Giovanzana,
Lubomír Grmela
,
Dinara Dallaeva,
Ştefan Ţălu,
S. ŢAlu,
Pavel Kaspar,
Pavel Tománek,
Stefano Giovanzana,
Lubomír Grmela
This paper is made freely available by the publisher.
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