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American Chemical Society, Chemistry of Materials, 5(29), p. 1898-1917, 2017

DOI: 10.1021/acs.chemmater.6b03483

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New Generation Electron Beam Resists: A Review

Journal article published in 2017 by Anushka S. Gangnaik ORCID, Yordan M. Georgiev, Justin D. Holmes
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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