Published in
Elsevier, Microelectronic Engineering, (190), p. 1-6
DOI: 10.1016/j.mee.2018.01.002
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Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size
Journal article published in 2018 by
Marco Abbarchi,
Meher Naffouti,
Mario Lodari,
Marco Salvalaglio,
Rainer Backofen,
Thomas Bottein,
Axel Voigt,
Thomas David 
,
Jean-Benoît Claude,
Mohammed Bouabdellaoui ,
Abdelmalek Benkouider,
Ibtissem Fraj,
Luc Favre,
Antoine Ronda,
Isabelle Berbezier
and other authors.
,
Jean-Benoît Claude,
Mohammed Bouabdellaoui ,
Abdelmalek Benkouider,
Ibtissem Fraj,
Luc Favre,
Antoine Ronda,
Isabelle Berbezier
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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