Published in
Elsevier, Microelectronic Engineering, (190), p. 54-56
DOI: 10.1016/j.mee.2018.01.006
Links
Tools
A method to determine the pressure and densities of gas stored in blisters: Application to H and He sequential ion implantation in silicon
This paper is available in a repository.
Full text: Download
Postprint:
archiving forbidden
Published version:
archiving forbidden
Data provided by 