Published in
Elsevier, Microelectronic Engineering, (192), p. 19-24
DOI: 10.1016/j.mee.2018.01.027
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Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
Journal article published in 2018 by
Joan Vila-Comamala 
,
Lucia Romano,
Vitaliy Guzenko,
Matias Kagias,
Marco Stampanoni,
Konstantins Jefimovs,
K. Jefimovsa
,
Lucia Romano,
Vitaliy Guzenko,
Matias Kagias,
Marco Stampanoni,
Konstantins Jefimovs,
K. Jefimovsa
This paper was not found in any repository, but could be made available legally by the author.
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