Published in
American Institute of Physics, Journal of Applied Physics, 14(119), p. 145307, 2016
DOI: 10.1063/1.4946039
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A kinetic model for stress generation in thin films grown from energetic vapor fluxes
Journal article published in 2016 by
E. Chason,
M. Karlson,
J. J. Colin,
D. Magnfält 
,
K. Sarakinos ,
G. Abadias
,
K. Sarakinos ,
G. Abadias
This paper is made freely available by the publisher.
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