Published in
Elsevier, Sensors and Actuators A: Physical, (273), p. 293-302, 2018
DOI: 10.1016/j.sna.2018.02.027
Links
Tools
Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 