Published in
American Institute of Physics, Physics of Plasmas, 8(25), p. 080705
DOI: 10.1063/1.5045816
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Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge
Journal article published in 2018 by
Sarveshwar Sharma,
Sen Abhijit,
N. Sirse,
M. M. Turner 
,
A. R. Ellingboe
,
A. R. Ellingboe
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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