Published in

American Institute of Physics, Applied Physics Letters, 8(113), p. 083103

DOI: 10.1063/1.5043479

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Wafer-scale photolithography of ultra-sensitive nanocantilever force sensors

Journal article published in 2018 by Ying Pan, Calder Miller, Kai Trepka ORCID, Ye Tao ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Data provided by SHERPA/RoMEO

Abstract

The detection of small forces using singly clamped cantilevers is a fundamental feature in ultrasensitive versions of scanning probe force microscopy. In these technologies, silicon-based nanomechanical devices continue to be the most widespread high-performance nanomechanical sensors for their availability, ease of fabrication, inherently low mechanical dissipation, and good control of surface-induced mechanical dissipation. Here, we develop a robust method to batch fabricate extreme-aspect-ratio (103), singly clamped scanning nanowire mechanical resonators from plain bulk silicon wafers using standard photolithography. We discuss the superior performance and additional versatility of the approach beyond what can be achieved using the established silicon on insulator technology.