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IOP Publishing, Semiconductor Science and Technology, 9(33), p. 095012, 2018

DOI: 10.1088/1361-6641/aad5d1

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Characterizing 10 nm node based BEOL interconnects at low-frequency regime based on a transmission-line modelling approach

Journal article published in 2018 by Gabriela Méndez-Jerónimo ORCID, Víctor H. Vega-González, Christopher J. Wilson, Reydezel Torres-Torres ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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