Deposition of SiOx coatings by inductively coupled plasma: Effect of pulsed hexamethyldisiloxan flow
Journal article published in 2018 by
Markus Brochhagen 
,
Sascha Chur,
Vincent Layes ,
Marc Böke ,
Jan Benedikt
,
Sascha Chur,
Vincent Layes ,
Marc Böke ,
Jan Benedikt
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