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Wiley, Advanced Materials Technologies, 3(3), p. 1700293, 2018

DOI: 10.1002/admt.201700293

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Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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