Dry-etching-assisted femtosecond laser machining (Laser Photonics Rev. 11(3)/2017)
Journal article published in 2017 by
Xue-Qing Liu,
Qi-Dai Chen,
Kai-Min Guan,
Zhuo-Chen Ma,
Yan-Hao Yu,
Qian-Kun Li,
Zhen-Nan Tian,
Hong-Bo Sun
This paper is made freely available by the publisher.
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