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Vacuum and Surface Science, 4(61), p. 227-235

DOI: 10.1380/vss.61.227

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Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation

Journal article published in 2018 by Tetsuya Miyazawa ORCID, Kensuke Tobishima, Hiroo Kato, Masashi Kurihara, Shinya Ohno, Takashi Kikuchi, Kazuhiko Mase
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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