Dissemin is shutting down on January 1st, 2025

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American Institute of Physics, Journal of Vacuum Science and Technology A, 5(36), p. 051507

DOI: 10.1116/1.5044643

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Gas-cluster ion sputtering: Effect on organic layer morphology

Journal article published in 2018 by Christopher M. Goodwin ORCID, Zachary E. Voras, Thomas P. Beebe
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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