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Published in

American Association for the Advancement of Science, Science Advances, 6(3), 2017

DOI: 10.1126/sciadv.1602586

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Nondestructive imaging of atomically thin nanostructures buried in silicon

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Microwave microscopy enables three-dimensional characterization of atomically thin semiconductor structures with nanometer precision.