Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
Journal article published in 2018 by
Martin H. P. Pfeiffer,
Junqiu Liu 
,
Arslan S. Raja,
Tiago Morais,
Bahareh Ghadiani,
Tobias J. Kippenberg
,
Arslan S. Raja,
Tiago Morais,
Bahareh Ghadiani,
Tobias J. Kippenberg
This paper is made freely available by the publisher.
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