Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 3(35), p. 031508
DOI: 10.1116/1.4979007
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Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
Journal article published in 2017 by
Virginia R. Anderson,
Neeraj Nepal,
Scooter D. Johnson,
Zachary R. Robinson,
Anindya Nath,
Alexander C. Kozen,
Syed B. Qadri,
Alexander DeMasi,
Jennifer K. Hite 
,
Karl F. Ludwig,
Charles R. Eddy
,
Karl F. Ludwig,
Charles R. Eddy
This paper is made freely available by the publisher.
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