Published in
IOP Publishing, Journal of Micromechanics and Microengineering, 10(28), p. 105007, 2018
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Suspended GaN beams and membranes on Si as a platform for waveguide-based THz applications
Journal article published in 2018 by
S. Krause 
,
V. Desmaris ,
A. Pavolotsky ,
D. Meledin,
V. Belitsky
,
V. Desmaris ,
A. Pavolotsky ,
D. Meledin,
V. Belitsky
This paper is made freely available by the publisher.
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