Published in
Springer Verlag, Journal of Materials Science, 11(52), p. 6216-6224
DOI: 10.1007/s10853-017-0855-6
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Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor
Journal article published in 2017 by
Lukas Mai 
,
Zivile Giedraityte,
Marcel Schmidt,
Detlef Rogalla,
Sven Scholz,
Andreas D. Wieck ,
Anjana Devi ,
Maarit Karppinen
,
Zivile Giedraityte,
Marcel Schmidt,
Detlef Rogalla,
Sven Scholz,
Andreas D. Wieck ,
Anjana Devi ,
Maarit Karppinen
This paper is available in a repository.
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