Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (161-163), p. 348-353
DOI: 10.1016/s0168-583x(99)00925-8
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Microprobe elemental maps can be manipulated in several ways to extract information. In this paper we show two methods of obtaining information. One method concerns the displaying of correlation between elements. A technique for displaying two or three elements in one correlation map is described. Such a correlation map yields precise information about the overlap between the elements without distorting the original data.A second method concerns the determination of the homogeneity. The homogeneity of small sample sizes has become more important due to improvements in sensitivity of many analytical techniques. We have explored the possibility of calculating a homogeneity factor from an elemental map. A procedure to check the validity of this calculation is proposed.