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Trans Tech Publications, Materials Science Forum, (924), p. 225-228, 2018

DOI: 10.4028/www.scientific.net/msf.924.225

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Deep Level Defects in 4H-SiC Epitaxial Layers

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We present a study of electrically active radiation-induced defects formed in 4H-SiC epitaxial layers following irradiation with fast neutrons, as well as 600 keV H+and 2 MeV He++ion implantations. We also look at electron emission energies and mechanisms of the carbon vacancy in 4H-SiC by means of first-principles modelling. Combining the relative stability of carbon vacancies at different sites with the relative amplitude of the observed Laplace-DLTS peaks, we were able to connect Z1and Z2to emissions from double negatively charged carbon vacancies located at theh- andk-sites, respectively.