Trans Tech Publications, Materials Science Forum, (924), p. 225-228, 2018
DOI: 10.4028/www.scientific.net/msf.924.225
Full text: Unavailable
We present a study of electrically active radiation-induced defects formed in 4H-SiC epitaxial layers following irradiation with fast neutrons, as well as 600 keV H+and 2 MeV He++ion implantations. We also look at electron emission energies and mechanisms of the carbon vacancy in 4H-SiC by means of first-principles modelling. Combining the relative stability of carbon vacancies at different sites with the relative amplitude of the observed Laplace-DLTS peaks, we were able to connect Z1and Z2to emissions from double negatively charged carbon vacancies located at theh- andk-sites, respectively.