Published in
MAIK Nauka/Interperiodica, Technical Physics Letters, 5(44), p. 435-437
DOI: 10.1134/s1063785018050218
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Low-Energy Defectless Dry Etching of the AlGaN/AlN/GaN HEMT Barrier Layer
Journal article published in 2018 by
S. V. Mikhailovich,
A. Y.-U. Pavlov 
,
K. N. Tomosh,
Y.-U. V. Fedorov
,
K. N. Tomosh,
Y.-U. V. Fedorov
This paper was not found in any repository, but could be made available legally by the author.
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