Impact of Ge pre-amorphization implantation on forming ultrathin TiGe x on both n- and p-Ge substrate

Luo, Xue; Wang, Guilei; Xu, Jing; Duan, Ningyuan; Mao, Shujuan; Liu, Shi; Li, Junfeng; Wang, Wenwu; Chen, Dapeng; Zhao, Chao; Ye, Tianchun; Luo, Jun

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IOP Publishing, Japanese Journal of Applied Physics, 7S2(57), p. 07MA02, 2018

DOI: 10.7567/jjap.57.07ma02

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Impact of Ge pre-amorphization implantation on forming ultrathin TiGe x on both n- and p-Ge substrate

Journal article published in 2018 by Xue Luo, Guilei Wang, Jing Xu, Ningyuan Duan, Shujuan Mao, Shi Liu, Junfeng Li, Wenwu Wang, Dapeng Chen, Chao Zhao, Tianchun Ye

, Jun Luo

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Impact of Ge pre-amorphization implantation on forming ultrathin TiGe x on both n- and p-Ge substrate