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IOP Publishing, Nanotechnology, 40(27), p. 405302

DOI: 10.1088/0957-4484/27/40/405302

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Area-selective atomic layer deposition of platinum using photosensitive polyimide

Journal article published in 2016 by René H. J. Vervuurt ORCID, Akhil Sharma, Yuqing Jiao, Wilhelmus (Erwin) M M. Kessels ORCID, Ageeth A. Bol ORCID
Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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