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Published in

Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 4(25), p. 716-724, 2016

DOI: 10.1109/jmems.2016.2574958

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Integration of Thick-Film Permanent Magnets for MEMS Applications

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

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Preprint: archiving allowed
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Postprint: archiving allowed
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Published version: archiving forbidden
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