Published in
American Association for the Advancement of Science, Science Advances, 11(3), 2017
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Complex dewetting scenarios of ultrathin silicon films for large-scale nanoarchitectures
Journal article published in 2017 by
Meher Naffouti 
,
Rainer Backofen ,
Marco Salvalaglio ,
Thomas Bottein,
Mario Lodari,
Axel Voigt,
Thomas David ,
Abdelmalek Benkouider,
Ibtissem Fraj ,
Luc Favre ,
Antoine Ronda,
Isabelle Berbezier,
David Grosso ,
Marco Abbarchi,
Monica Bollani
,
Rainer Backofen ,
Marco Salvalaglio ,
Thomas Bottein,
Mario Lodari,
Axel Voigt,
Thomas David ,
Abdelmalek Benkouider,
Ibtissem Fraj ,
Luc Favre ,
Antoine Ronda,
Isabelle Berbezier,
David Grosso ,
Marco Abbarchi,
Monica Bollani
This paper is made freely available by the publisher.
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Abstract
Si-based nanoarchitectures are formed with unprecedented precision and reproducibility via templated dewetting of thin SOI.