Published in
American Institute of Physics, APL Materials, 5(6), p. 058502
DOI: 10.1063/1.5011740
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In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry
Journal article published in 2018 by
Martin Kreuzer 
,
Guy L. Whitworth ,
Achille Francone,
Jordi Gomis-Bresco,
Nikolaos Kehagias,
Clivia M. Sotomayor-Torres
,
Guy L. Whitworth ,
Achille Francone,
Jordi Gomis-Bresco,
Nikolaos Kehagias,
Clivia M. Sotomayor-Torres
This paper is made freely available by the publisher.
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