Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Semiconductor Manufacturing, 2(31), p. 315-322
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Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes
Journal article published in 2018 by
Ghalia Tello 
,
Omar Y. Al-Jarrah ,
Paul D. Yoo ,
Yousof Al-Hammadi ,
Sami Muhaidat ,
Uihyoung Lee
,
Omar Y. Al-Jarrah ,
Paul D. Yoo ,
Yousof Al-Hammadi ,
Sami Muhaidat ,
Uihyoung Lee
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