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Institute of Electrical and Electronics Engineers, IEEE Transactions on Semiconductor Manufacturing, 2(31), p. 315-322

DOI: 10.1109/tsm.2018.2825482

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Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes

Journal article published in 2018 by Ghalia Tello ORCID, Omar Y. Al-Jarrah ORCID, Paul D. Yoo ORCID, Yousof Al-Hammadi ORCID, Sami Muhaidat ORCID, Uihyoung Lee
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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