Published in
American Institute of Physics, AIP Advances, 10(7), p. 105117
DOI: 10.1063/1.5002173
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Surface cleaning and pure nitridation of GaSb by in-situ plasma processing
Journal article published in 2017 by
Takahiro Gotow,
Sachie Fujikawa,
Hiroki I. Fujishiro,
Mutsuo Ogura,
Wen Hsin Chang 
,
Tetsuji Yasuda,
Tatsuro Maeda
,
Tetsuji Yasuda,
Tatsuro Maeda
This paper is made freely available by the publisher.
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