Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback
Journal article published in 2018 by
Stephen Jesse 
,
Bethany M. Hudak ,
Eva Zarkadoula ,
Jiaming Song ,
Artem Maksov ,
Miguel Fuentes-Cabrera ,
Panchapakesan Ganesh ,
Ivan Kravchenko ,
Panchapakesan C. Snijders ,
Andrew R. Lupini ,
Albina Y. Borisevich ,
Sergei V. Kalinin
,
Bethany M. Hudak ,
Eva Zarkadoula ,
Jiaming Song ,
Artem Maksov ,
Miguel Fuentes-Cabrera ,
Panchapakesan Ganesh ,
Ivan Kravchenko ,
Panchapakesan C. Snijders ,
Andrew R. Lupini ,
Albina Y. Borisevich ,
Sergei V. Kalinin
This paper is made freely available by the publisher.
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