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Royal Society of Chemistry, RSC Advances, 9(8), p. 4987-4994

DOI: 10.1039/c7ra13417g

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Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) yttrium(iii): process development, film characterization and functional properties

Journal article published in 2018 by Lukas Mai ORCID, Nils Boysen ORCID, Ersoy Subaşı ORCID, Teresa de los Arcos ORCID, Detlef Rogalla ORCID, Guido Grundmeier, Claudia Bock ORCID, Hong-Liang Lu ORCID, Anjana Devi ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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