Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence
Journal article published in 2017 by
F. Mitschker,
S. Steves,
M. Gebhard,
M. Rudolph,
L. Schücke,
D. Kirchheim,
M. Jaritz,
M. Brochhagen,
Ch Hoppe,
R. Dahlmann,
M. Böke,
J. Benedikt 
,
I. Giner,
T. de los Arcos,
Ch Hopmann
and other authors.
,
I. Giner,
T. de los Arcos,
Ch Hopmann
and other authors.
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