Published in
American Institute of Physics, Applied Physics Letters, 1(111), p. 013501
DOI: 10.1063/1.4990960
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Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers
Journal article published in 2017 by
Vikrant J. Gokhale 
,
Jason J. Gorman
,
Jason J. Gorman
This paper is made freely available by the publisher.
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