Published in
IOP Publishing, Japanese Journal of Applied Physics, 4S(56), p. 04CC02, 2017
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Interlayer coupling effect on the performance of monolithic three-dimensional inverters and its dependence on the interlayer dielectric thickness
Journal article published in 2017 by
Junichi Hattori,
Koichi Fukuda 
,
Toshifumi Irisawa,
Hiroyuki Ota,
Tatsuro Maeda
,
Toshifumi Irisawa,
Hiroyuki Ota,
Tatsuro Maeda
This paper is made freely available by the publisher.
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