Dissemin is shutting down on January 1st, 2025

Published in

Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 2(26), p. 376-384, 2017

DOI: 10.1109/jmems.2017.2654126

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Reusable High Aspect Ratio 3-D Nickel Shadow Mask

This paper is available in a repository.
This paper is available in a repository.

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Preprint: archiving allowed
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Postprint: archiving allowed
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Published version: archiving forbidden
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